Nuclear Reaction Analysis (NRA)

Nuclear Reaction Analysis (NRA) is used to measure low-Z elements (such as carbon, nitrogen, oxygen, and boron) in thin films. With NRA, the primary projectile induces a nuclear reaction with the low-Z nuclei in the thin film and ejects particles with kinetic energies characteristic of specific nuclear reaction.

The NRA signal can be used to quantitatively measure the total atoms/cm² of B, C, N, and O present in a film. These elements can be measured at a much lower concentration with NRA than they typically can with RBS. By performing NRA in combination with RBS, you can quantitatively determine the contamination levels of light elements in thin films. 

Very few independent labs offer this unique analytical service, and none can match Evan Analytical Group®’s (EAG) depth and breadth of experience. We routinely analyze a wide range of materials, including very thin films. Plus, you can count on fast turnaround times, accurate data, and person-to-person service, ensuring you understand the analytical test results and what they mean for your material or process.

View Application Notes

Ideal Uses for NRA Analysis		Relevant Industries for NRA Analysis
Measuring low levels of B, C, N, and O in thin films		Aerospace Defense Semiconductor Telecommunications
Strengths of NRA Analysis		Limitations of NRA Analysis
Non-destructive compositional analysis Quantitative without standards Whole wafer analysis (150, 200, 300 mm) as well as irregular and large samples Conductor and insulator analysis Low-Z element sensitivity		Large analysis area (1 mm) No depth resolution Each element requires a specific projectile, so multiple measurements maybe necessary depending on the elements involved

Application Notes