EAG Semiconductor Solutions

Evans Analytical Group® (EAG) is the world's foremost materials characterization laboratory for the semiconductor industry, which includes semiconductor equipment companies, integrated circuit manufactures, fabless design houses and vertically integrated design and manufaturning organizations. Not only do we understand the language, we have worked with almost every major company in the industry, giving us intimate knowledge of the problems encountered in this sector. We are adept at handling non-routine analyses, such as small spot size, ultra-thin layers, and also new materials.

Our surface and microanalytical techniques are critical to helping you:

• Develop new processes
• Characterize ongoing processes
• Reduce development time
• Transfer processes to production
• Ensure the purity of starting materials
• Qualify new production tools
• Solve yield-reducing production problems

Application Examples

• Measuring the thickness, density, and composition of films
• Assessing the cleaning efficacy by quantifying surface metals on Si wafers
• Characterizing dopant dose and profile shape
• Identifying and locating trace level impurities in semiconductor stacks
• Examining the cross-sectional structure of IC's
• Identifying particle contamination
• Identifying organic contamination on Si wafers
• Visualizing film morphology
• Identifying wafer haze and discoloration
• Quantifying bulk dopants or impurities

Application Notes